Zygo Receives Follow-On Order For Back End Of Line Metrology

Middlefield, CT - Zygo Corporation, a worldwide optical metrology supplier, recently announced that it has received a follow-on order from a leading semiconductor manufacturer for its new fully automated metrology system, the UniFire-7900. The system will be used to consolidate lithography metrology tools in 300mm wafer fabrication and is expected to be delivered in the second quarter of this calendar year.

The UniFire-7900 optical metrology tool delivers high precision three-dimensional information that can be used for surface topography, critical dimension, overlay/registration, and film thickness process control in one small footprint. This single, multi-functional tool allows semiconductor manufacturers to consolidate their metrology tools in their lithography and etch modules, saving valuable clean room real estate and reducing total cost of ownership.

Michael Darwin, ZYGO's Vice President, Semiconductor Solutions Business Unit, commented, "As semiconductor manufacturers increase their attention to reducing costs, especially inline Metrology capital equipment expenditures, our consolidation strategy is being well received. This follow-on order is further evidence of our expanding product portfolio into the semiconductor industry's back end of the line."

SOURCE: Zygo Corporation