Datasheet: TMS-600/650
Source: Polytec
The TopMap TMS-600/650 utilizes scanning white light interferometry to generate high resolution, 3D topographical images, over a sample area of about 30 mm x 40 mm. It produces images with a resolution of 0.01 micron or better in the z-direction, depending on surface roughness. The system also offers 3D image analysis software, a LabView driver for easy integration into existing software environments and the ability to export all data in ASCII format.
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