Therma-Wave Integrated Metrology Expands In-Process Production Market; Receives Largest Single Order To Date For Optical CD Solution
FREMONT, CA - Therma-Wave, Inc., a worldwide leader in the development, manufacture and sale of process control metrology systems used in the manufacture of semiconductors, today announced that it has received a multiple unit, multi-million dollar order for its integrated metrology (IM) solution -- the INTEGRA(R) CCD-i (Compact CD-integrated). The order, booked by Therma-Wave in the fiscal third quarter 2005 ended December 26, 2004, is the largest single order to date for the INTEGRA(R) CCD-i solution.
IM is a critical component to achieving effective, advanced process control, equipment utilization and maximum device yield in semiconductor production. To date, the industry has focused mostly on strategic placements of Critical Dimension (CD) IM solutions. Recently, however, the industry has moved toward greater adoption of IM for CD control and consequently has begun deployment of the technology into advanced manufacturing processes at 90nm and pilot 65nm production facilities.
"Therma-Wave's IM technology is again paving the way with innovative new metrology solutions to help our customers succeed in streamlining their manufacturing processes and increasing production yields," noted Boris Lipkin, president and chief executive officer of Therma-Wave. "As strategic placements and early adopters move the technology into the production process, it is clear that the industry has begun to accept integrated optical CD metrology for use in advanced semiconductor production."
The INTEGRA CCD-i tools provide best-in-class optical CD measurement capability. The CCD-i is built on a robust, compact footprint, high throughput optical platform that provides measurement precision, repeatability and integrated CD results particularly suited to advanced high throughput lithography applications.
About Therma-Wave, Inc.
Since 1982, Therma-Wave, Inc. has been revolutionizing process control metrology systems through innovative proprietary products and technologies. The company is a worldwide leader in the development, manufacture, marketing and service of process control metrology systems used in the manufacture of semiconductors. Therma-Wave currently offers leading-edge products to the semiconductor manufacturing industry for the measurement of transparent, semi-transparent, and opaque thin films; for the measurement of critical dimensions and profile of IC features; for the monitoring of ion implantation; and for the integration of metrology into semiconductor processing systems. For further information about Therma-Wave, Inc., access the web site at: www.thermawave.com.
Source: Therma-Wave, Inc.