Radial Measuring System

Specs include linear accuracy in the X and Z axes of 2 microns; the U2 (X and Z axes) is 2+ L/500 microns, and angular accuracy is 3 arc-seconds. Acceleration is 1,000 mm/s2 along the X and Z axes and 250 mm/s2 along the Y axis with measuring speeds of 250 mm/s.
The bi-directional rotation of the bridge means there is no need for a rotary table, and the bridge provides the 4th axis of measurement while only three axes are moving. The measuring range is 1 m diameter and 0.6 m high, occupying less than 2.5 m2 of floor space. The workpiece remains in place while the system travels in the surrounding cylindrical coordinates to measure the part.
TSK America, Advanced Metrology Div., 20 Chapin Rd., #1003, P.O. Box 838, Pine Brook, NJ 07058. Tel: 800-247-9875.