MKS, Ion Systems Introduces A Modulated Pulse Ionizing Bar

Andover, MA - MKS Instruments, Inc. a global provider of technologies that enable advanced processes and improve productivity, has introduced the Ion Systems AeroBar MP Model 5625 for effective elimination of static charge in advanced flat panel display (FPD) manufacturing processes and related applications. The Modulated Pulse (MP) technology lowers swing voltage, reduces discharge times and prolongs cleaning cycle times as compared with conventional pulsed AC products providing more efficient, lower maintenance static charge elimination.

The AeroBar MP's high frequency sine wave technology produces a continuous, high level of ion generation which the modulated pulses harvest and transport to the target in advanced flat panel display manufacturing and other applications requiring low balance offsets. These features enhance the ability of the AeroBar MP to repel airborne molecular contaminants (AMC) in the environment, dramatically reducing the clean dry air (CDA) consumption and increasing the length between cleaning cycles in static elimination operations.

The new AeroBar MP Model 5625 achieves best-in-class for ionizer efficiency. Easy adjustments to frequency, voltage, and balance provide a wide-range of performance settings to meet users' exact requirements. An FMS signal permits connection to a tool controller or host computer. The AeroBar MP offers reduced maintenance and running cost for lower overall Cost of Ownership (COO) for static elimination, as well as higher yield essential for competitive production systems in today's economy.

SOURCE: MKS Instruments, Inc.