News | November 12, 2008

Metryx Receives Two IC Industry Awards From EuroAsia Semiconductor

BRISTOL, U.K.--(BUSINESS WIRE)--Metryx, Limited, a supplier of mass metrology equipment to the semiconductor manufacturing industry, today announced that it has been recognized twice by EuroAsia Semiconductor at the 2008 IC Industry Awards, presented at this year's SEMICON Europa. The new awards follow the Start-Up of the Year Award received from EuroAsia Semiconductor in 2007.

The Metryx Mentor, which brings the company's unique mass metrology technology to semiconductor manufacturers, was named Best Yield Management Tool. Rob Wilby, a co-founder and CTO of Metryx, was honored as Semiconductor Engineer of the Year for his role in inventing and developing mass metrology for leading–edge semiconductor applications.

"This dual recognition, for both product and engineer, highlights the value that Metryx brings to the metrology marketplace, and we are honored to have received both awards," stated Dr. Adrian Kiermasz, president and CEO of Metryx, Ltd. "The Best Tool Award for the Metryx Mentor, as determined by our customers and peers, validates the effectiveness of mass metrology's approach to yield management. Having Rob honored personally for his role in bringing this key new technology to market further highlights the strength of engineering that goes into Metryx's products."

"This is the second year in a row that Metryx has been recognized by the readers of EuroAsia Semiconductor," said David Ridsdale, Editor-in-Chief of EuroAsia Semiconductor. "Conceptually, mass metrology is a refreshingly simple process that will have an extremely positive impact on process and cost control. We're extremely pleased to not only recognize the company for its accomplishments to date, but to also recognize the individual, Rob Wilby, who has developed and simplified this complex technology to deliver recognized benefit to the fab."

Metryx's DF3 300mm Mass Metrology Tool
Metryx's Mentor metrology tools monitor the mass of any wafer following a process step to quickly determine whether device manufacture process steps are operating consistently using passive data collection (PDC) and distribution analysis. The ability to quickly and accurately identify any process change allows the process to be corrected or stopped immediately, saving scrap and preventing yield loss. The tools can be used to monitor a number of applications, including advanced barriers, low-k porogen removal and sillicon etch applications. The versatility of the metrology enables measurement on metals and dielectrics, etch, deposition and CMP processes.

The Mentor tool is used as an inline metrology tool and, because it is non-destructive, can be used directly on device wafers. The tool offers atomic level repeatability, low cost of ownership and high return on investment. The small-footprint Mentor is capable of throughput of up to 60 wafers per hour to enable nanotechnology mass measurement of production wafers, as well as test and blanket wafers, independent of substrate size or material.

About the IC Industry Awards
The Awards recognize excellence in providing the industry with timely solutions to enable manufacturers to meet or exceed technology and business goals. The Best Yield Management Tool Award was determined by online voting on the EuroAsia Semiconductor website. The Metryx Mentor was recognized as the best tool improving yield management in semiconductor engineering, an area with extremely rigid parameters that has become a critical component of success in semiconductor manufacturing. The Engineer of the Year Award is designed to honor an individual whose peers feel that their contribution adds value and impetus to the company's fortunes.

About Metryx
Metryx is a semiconductor equipment manufacturer specializing in unique nanotechnology mass measurement techniques. Based in Bristol, England, Metryx's non-destructive 200mm and 300mm metrology tools offer atomic layer accuracy making them ideal for material characterization and device manufacture process control. For more information on the company and its products please visit

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