Hitachi High Technologies America Introduces New In-Lens Field Emission Scanning Electron Microscope

PLEASANTON, CA - Hitachi High Technologies America, Inc. today announced the release of its latest high-resolution in-lens Field Emission Scanning Electron Microscope (FE-SEM), the new Model S-5500. The S-5500 is the latest in a long line of state-of-the-art microscopes by Hitachi, the undisputed world leader in FE-SEM technology.

As the only in-lens FE-SEM on the market, the S-5500 is the highest performance scanning electron microscope in the world, guaranteeing 4 angstrom (0.4nm) image resolution in secondary electron (SE) mode. This system features complete control of generated signals using the "Super E-cross-B" filter and secondary/backscattered (SE/BSE) electron signal mixing. The in-lens design offers stability and an environment for 2,000,000 times magnification. The S-5500 is available with the new Hitachi "Duo-STEM" detector, which incorporates both a phase contrast (brightfield) and z-contrast (darkfield) collection ability in an innovative new scanning transmission electron microscope (STEM) detector.

The diverse capabilities of the instrument bridge many research fields, from silicon-based device design and characterization to biological applications with high throughput and fast sample exchange. This allows the user to achieve high quality results quickly and easily.

"Advances in transmitted electron detection technology and countermeasures against environmental interferences make our new in-lens SEM design a powerful investigative tool for nanotechnology research," said Robert Gordon, Vice President and General Manager, Hitachi High Technologies America, Inc. "This tool will bridge the gap between high-resolution SEM and high-voltage TEM with low-voltage STEM control and contrast that was unheard of before and this tool will operate on the same user interface as the other popular Hitachi systems which populate so many research laboratories."

The unit is suitable for the biological applications, imaging of 2nm colloidal gold labeling, transmitted electron imaging of polymers, MR Head imaging with a highly sensitive YAG-BSE detector, Cryo stage capabilities for pharmaceutical, biological, and food industry research and a nanomanipulation device for advanced carbon nanotube research.

Hitachi High-Technologies Corporation (HHT), headquartered in Tokyo, Japan, is engaged in activities in a broad range of fields, including device manufacturing equipment, life sciences, information technology, electronic components, and advanced industrial materials. HHT consolidated sales for 2004 were over $8.3B. For further information, visit http://www.hitachi-hitec.com/oversea/index.html.

Hitachi High Technologies America, Inc. (HTA), headquartered in Schaumburg, IL, sells and services a full range of products for metrology, etch, defect review, inspection and failure analysis. HTA is comprised of nine business units: Electron Microscope, Semiconductor Equipment, Life Sciences, Information Systems, Electronics Applied Systems, Electronic Components, Electronic Products, Hard Drive Manufacturing Systems and Advanced Materials. Sales for FY 2004 were approximately $1B. For further information, visit http://www.hitachi-hta.com.

Hitachi, Ltd., (NYSE:HIT), headquartered in Tokyo, Japan, is a leading global electronics company with approximately 347,000 employees worldwide. Fiscal 2004 (ended March 31, 2005) consolidated sales totaled 9,027.0 billion yen ($84.4 billion). The company offers a wide range of systems, products and services in market sectors including information systems, electronic devices, power and industrial systems, consumer products, materials and financial services. For more information on Hitachi, please visit the company's Website at http://www.hitachi.com.

Source: Hitachi, Ltd.