EMPIR Project Enables Launch Of Worlds First Self-Contained Portable Dew-Frost Point Calibrator

Higher performance optical-based methods to serve the humidity measurement supply chain

Trace water is the single largest matrix contaminant in ultra-high purity process gases such as argon, nitrogen and hydrogen. Its presence affects the quality of products where these gases are used. Even though the production of ultra-high purity gases serves many key technology areas, such as high-value semiconductor manufacturing and pharmaceuticals, before the work of this project the trace water measurements were still lacking metrological traceability in the relevant ranges and matrix gases.

Recently completed EMPIR project Metrology for trace water in ultra-pure process gases (20IND06, PROMETH2O) has worked to fill the knowledge gap regarding metrological traceability. The consortium has developed traceable and improved optical measurement methods for trace water contamination of just a few parts per billion - for use in the production of pure process gases.

World first
Research from the project has enabled project partner Qrometric to validate its frost point generator with un unprecedented accuracy down to -100°C frost point temperature, a temperature range not previously covered by any commercial portable calibrator. The frost point generator system is the world’s first self-contained portable dew/frost point calibrator to provide measurement traceability in the field.

For the first time, instrumentation is available for accurate in-situ calibration of humidity sensors and analysers. With a validated temperature measurement range of -100 °C to 0 °C and an accuracy between 0.5 °C to 0.05 °C this instrument is capable of measurements at temperatures lower than most primary calibration standards.

This advance will allow improved trace water measurements that will support waste reduction in European strategic sectors, such as the microelectronics industry and energy gases, and provide better production environments for pharmaceuticals.

Project coordinator Vito Fernicola from INRIM said

‘The PROMETH2O project has successfully addressed a critical gap in metrological traceability for trace water contamination in ultra-high purity gases. By developing validated methods and supporting the launch of QROMETRIC's LFPG, the project has enabled accurate in-situ calibration of humidity sensors ensuring reliable and traceable measurements down to -100°C frost point.

This world-first instrument represents a major advance in the field, as it allows direct calibration of sensors and analysers at the trace water level (at ppb level) greatly advancing the state of the art of industrial calibration systems.

The improved accuracy and traceability will enhance quality control in various industries, such as microelectronics and pharmaceuticals, leading to better product reliability. This achievement highlights the impact of European metrology research in supporting industry needs with high-precision measurement solutions.’

This EMPIR project is co-funded by the European Union's Horizon 2020 research and innovation programme and the EMPIR Participating States.