CyberOptics Semiconductor To Present WaferSense Auto Gapping System (AGS300) At Semicon West
CyberOptics Semiconductor will feature its WaferSense Auto Gapping System (AGS300) along with their full line of WaferSense wireless metrology devices (cyberopticssemi.com/products/wafersense/ags/) during Semicon West in booth 911 South.
Available in both 300 mm and 200 mm form factors, the WaferSense AGS 300 measures gaps that are critical to the outcome of semiconductor processes such as thin-film deposition, sputtering and etch. Consisting of three capacitive distance sensors, the wafer gapping system measures the gaps between shower heads and pedestals at three points that define a plane to ensure accurate and reproducible equipment setups. Using the AGS 300, engineers can better control gap uniformity and magnitude with high stability over time.
While legacy gap measurement methods employed a wired leveling device and crush blocks that were susceptible to instrument and operator variances, the AGS 300 provides wireless measurements with first film check rates to over 99% accuracy. There are no wires that can break after repeated use or misalign as a result of the vacuum pulling on wires. Its wafer-like design and height of only 7.5 mm also allows for automatic handling to speed equipment set ups, maintenance and troubleshooting. In addition, the wireless method is repeatable and gives engineers data to optimize preventive maintenance schedules and process controls.
Data can displayed on a laptop or PC in real-time so that gaps can be quickly adjusted, reducing tool calibration time. Current gap measurements are compared against target goals, with gap tolerances displayed in numerical and graphical forms to simplify adjustments. Readings can be logged so that the same gap is set across all of tools for better tool-to-tool process uniformity.
The AGS300 is a part of CyberOptics' WaferSense family of devices that also include the Airborne Particle Sensor, Auto Leveling System, Auto Vibration System and Auto Teach System. Each device is designed to optimize wafer processing routines.
For more information visit www.cyberopticssemi.com/.
SOURCE: CyberOptics Semiconductor, Inc.