Carl Zeiss Places Order for ZygoLOT Interferometers

Zygo Corp.'s (Middlefield, CT) European joint venture company, ZygoLOT GmbH (Darmstadt, Germany), has received an order from optics and instrumentation manufacturer Carl Zeiss (Oberkochen, Germany) for ZMI Displacement Measuring Interferometer systems. Zeiss will use the systems in its manufacturing equipment.

"This order further validates that Zygo's ZMI Displacement Measuring Interferometer systems provide the performance advantages required by customers in leading-edge stage metrology applications. We are very pleased that Carl Zeiss has chosen Zygo as their preferred supplier in this area," said Arno Kohler, managing director of ZygoLOT.

Designed to measure stage positions to better than 1 nm at velocities over 4 m/s over displacement ranges over 1 m, the ZMI displacement measuring interferometer systems are said to be the highest performance, laser-based, real-time position feedback systems available.

Applications include metrology tools and IC manufacturing as well as enabling high-performance manufacturing equipment. The product's high performance contributes directly to the positioning and throughput performance needed by these tools as geometric dimensions continue to shrink in the semiconductor and other industries.