Nanometrics Believes KLA-Tencor Patent Infringement Claim Has No Merit

Milipitas, CA -- Nanometrics Incorporated announced that it has received notice of a patent infringement lawsuit brought by KLA-Tencor Corporation (KLAC), alleging infringement of US Patents No. 6,483,580 (the '580 Patent) and 6,590,656 (the '656 Patent).

Nanometrics believes that KLA's lawsuit is primarily motivated by competitive concerns rather than a desire to protect its intellectual property. Nanometrics firmly believes that its products do not infringe any valid claim of the '580 or '656 patents and will aggressively pursue its defense to this infringement action. In addition, Nanometrics is examining all of its options with respect to the intellectual property rights related to its superior technologies.

Nanometrics CEO John Heaton explained that the company's metrology and optical critical dimension technologies have become more important to the semiconductor industry. "As a result of this trend, our intellectual property portfolio is also growing in its significance," observed Heaton. Nanometrics intends to aggressively defend and protect its intellectual property rights. "We will defend ourselves from these claims and remain vigilant in protecting our own technology rights," stated Heaton.

SOURCE: Nanometrics